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Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy. Effects of Zalar Rotation and Liquid Nitrogen Cold Stage

Description/Abstract:

We have investigated the Auger depth profiling analysis of InP/GaInAsP multilayer specimens. It is difficult to obtain the Auger depth pr...

Keyword:

Auger Depth Profiling Analysis, InP/GaInAsP Multilayers, Zalar Rotation Method, and Sample Cooling Method

Material/Specimen:

InP/GaInAsP Multilayers

Resource Type:

Article

Author:

Ogiwara, Toshiya, Tanuma, Shigeo, Nagasawa, Yuji, and Ikeo, Nobuyuki

Journal:

Journal of The Surface Science Society of Japan

Date Uploaded:

09/09/2021

Date Modified:

09/09/2021
試料冷却法を併用したAES深さ方向分析によるSiO2/Si熱酸化膜の分析

Description/Abstract:

試料冷却法を併用したAES深さ方向分析によるSiO2/Si熱酸化膜の分析について検討を行った．分析時の試料保持温度を常温および-190℃として，それぞれの温度について電子線電流密度を３段階に変えてデプスプロファイルを取得した．イオン加速電圧は3kVである．また，測定したオー...

Keyword:

Auger Depth Profiling Analysis, Sample Cooling Method, and SiO2/Si

Material/Specimen:

SiO2:103nm/Si-Substrate

Resource Type:

Article

Author:

Ogiwara, Toshiya and Tanuma, Shigeo

Journal:

Journal of Surface Analysis

Date Uploaded:

26/07/2021

Date Modified:

26/07/2021