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Depth Profiling Analysis of InP/GaInAsP Multilayer Structure with Auger Electron Spectroscopy by Using Argon Ion Spot Beam

Description/Abstract:

It is very difficult to obtained the Auger depth profile of InP multilayer structures with argon ion sputtering because the very large su...

Keyword:

Auger Depth Profiling Analysis, Argon Ion Spot Beam, and InP/GaInAsP Multilayer Specimen

Material/Specimen:

InP/GaInAsP Multilayer

Resource Type:

Article

Author:

OGIWARA, Toshiya, HARADA, Tomoko, and TANUMA, Shigeo

Journal:

Journal of The Surface Science Society of Japan

Date Uploaded:

01/10/2021

Date Modified:

01/10/2021