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InP/GaInAsP多層膜
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InP/GaInAsP多層膜におけるAES深さ分解能の温度依存性
Description/Abstract:
InP/GaInAsP多層膜を用いて，AES深さ方向分析における深さ分解能の試料温度依存性について検討を行なった．試料温度は，０〜５０℃（１０℃間隔）およびー１２０，−２０℃の８条件としてデプスプロファイルを取得した．スパッタリング条件は，イオン種：Ar，イオン加速電圧：1...
Keyword:
InP/GaInAsP多層膜
,
Auger Depth Profiling Analysis
,
Depth Resolution
, and
Sample Temperature
Material/Specimen:
InP/GaInAsP Multilayer Film
Resource Type:
Article
Author:
Ogiwara, Toshiya
and
Tanuma, Shigeo
Journal:
Journal of Surface Analysis
Date Uploaded:
28/05/2021
Date Modified:
28/05/2021
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Publication
1
Keyword
Auger Depth Profiling Analysis
1
Depth Resolution
1
InP/GaInAsP多層膜
[remove]
1
Sample Temperature
1
Language
Japanese
1
Publisher
Surface Analysis Society of Japan
1
Resource type
Article
1
Visibility
open
1
Rights Statement Sim
In Copyright
1
Material/Specimen
InP/GaInAsP Multilayer Film
1
Author
Ogiwara, Toshiya
1
Tanuma, Shigeo
1
Journal
Journal of Surface Analysis
1