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Raw data files for Fig. 7 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
Description/Abstract:
We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:
Auger depth profiling analysis
,
HfO2/Si
, and
Ultra low angle incidence ion beam
Resource Type:
Dataset
Data origin:
experiments
Author:
OGIWARA, Toshiya
,
NAGATA, Takahiro
, and
YOSHIKAWA, Hideki
Date Uploaded:
21/12/2022
Date Modified:
23/12/2022
Raw data files for Fig. 8 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
Description/Abstract:
We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:
Auger depth profiling analysis
,
HfO2/Si
, and
Ultra low angle incidence ion beam
Resource Type:
Dataset
Data origin:
experiments
Author:
OGIWARA, Toshiya
,
NAGATA, Takahiro
, and
YOSHIKAWA, Hideki
Date Uploaded:
22/11/2022
Date Modified:
23/12/2022
English Translation of J. Surf. Anal. 24, 192-205(2018), Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam
Description/Abstract:
We have investigated the Auger depth profiling analysis of HfO2 /Si by the glancing angle ion beam sputtering method at an incident angle...
Keyword:
Auger Depth Profiling Analysis
,
HfO2/Si
, and
Ultra Low Angle Incidence Ion Beam
Material/Specimen:
HfO2
Resource Type:
Article
Author:
Ogiwara, Toshiya
,
Nagata, Takahiro
, and
Yoshikawa, Hideki
Journal:
Journal of Surface Analysis
Date Uploaded:
19/08/2021
Date Modified:
20/08/2021
Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam
Description/Abstract:
We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:
Auger Depth Profiling analysis
,
HfO2/Si
, and
Ultra Low Angle Incidence Ion Beam
Material/Specimen:
HfO2
Resource Type:
Article
Author:
Yoshikawa, Hideki
,
Ogiwara, Toshiya
, and
Nagata, Takahiro
Journal:
Journal of Surface Analysis
Date Uploaded:
25/05/2021
Date Modified:
26/05/2021
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Auger depth profiling analysis
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Ultra Low Angle Incidence Ion Beam
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Ultra low angle incidence ion beam
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Auger Depth Profiling Analysis
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National Institute for Materials Science
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experiments
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spectroscopy
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NAGATA, Takahiro
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Nagata, Takahiro
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OGIWARA, Toshiya
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