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Summary of ISO/TC 201 Standard: XX ISO 18118: 2004 — Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy —Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials

Description/Abstract:

ISO 18118 provides guidance on the measurement and use of experimentally determined relative sensitivity factors for the quantitative ana...

Keyword:

AES, Auger electron spectroscopy, ISO, International Organization for Standardization, X-ray photoelectron spectroscopy, XPS, quantitative surface analysis, and relative sensitivity factor

Resource Type:

Article

Author:

TANUMA, Shigeo

Journal:

Surface and Interface Analysis

Date Uploaded:

08/10/2020

Date Modified:

01/07/2021

Summary of ISO/TC 201 Standard: XX ISO 18118: 2004 — Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy —Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials

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