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Halide Vapor Phase Epitaxy 2—Heteroepitaxial Growth of α- and ɛ-Ga2O3

Description/Abstract:

αおよびε酸化ガリウムのHVPE成長について解説する。

Keyword:

Ga2O3 and HVPE

Resource Type:

Book

Author:

大島祐一

Journal:

Gallium Oxide: Crystal Growth, Materials Properties, and Devices (Springer)

Date Uploaded:

30/01/2024