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Ultra High Depth Resolution Auger Depth Profiling by Both Electron and Ion Beams at the Glancing Incidence using an Inclined Specimen Holder

Description/Abstract:

We developed a 85°-high-angle inclined specimen holder which enabled the specimen surface to be irradiated by both electron and ion beams...

Keyword:

Auger Depth Profiling Analysis, Inclined Holder, GaAs/AlAs Superlattice, and Si/Ge multiple delta-doped layers

Material/Specimen:

GaAs/AlAs Superlattice and Si/Ge multiple delta-doped layers

Resource Type:

Article

Author:

Ogiwara, Toshiya, Nagatomi, Takaharu, Kim, Kyung Joong, and Tanuma, Shigeo

Journal:

Journal of The Surface Science Society of Japan

Date Uploaded:

08/09/2021

Date Modified:

08/09/2021