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Filtering by: Journal Journal of The Surface Science Society of Japan Type of work Publication Keyword Auger Depth Profiling Analysis Keyword InP/GaInAsP Multilayer Specimen Language Japanese Resource type Article

1. Depth Profiling Analysis of InP/GaInAsP Multilayer Structure with Auger Electron Spectroscopy by Using Argon Ion Spot Beam

Description/Abstract:: It is very difficult to obtained the Auger depth profile of InP multilayer structures with argon ion sputtering because the very large su...
Keyword:: Auger Depth Profiling Analysis, Argon Ion Spot Beam, and InP/GaInAsP Multilayer Specimen
Material/Specimen:: InP/GaInAsP Multilayer
Resource Type:: Article
Author:: OGIWARA, Toshiya, HARADA, Tomoko, and TANUMA, Shigeo
Journal:: Journal of The Surface Science Society of Japan
Date Uploaded:: 01/10/2021
Date Modified:: 01/10/2021

1. Depth Profiling Analysis of InP/GaInAsP Multilayer Structure with Auger Electron Spectroscopy by Using Argon Ion Spot Beam

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1. Depth Profiling Analysis of InP/GaInAsP Multilayer Structure with Auger Electron Spectroscopy by Using Argon Ion Spot Beam

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