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Filtering by: Journal Journal of The Surface Science Society of Japan Type of work Publication Keyword Argon Ion Spot Beam Language Japanese Publisher Surface Science Society of Japan

Depth Profiling Analysis of InP/GaInAsP Multilayer Structure with Auger Electron Spectroscopy by Using Argon Ion Spot Beam

Description/Abstract:

It is very difficult to obtained the Auger depth profile of InP multilayer structures with argon ion sputtering because the very large su...

Keyword:

Auger Depth Profiling Analysis, Argon Ion Spot Beam, and InP/GaInAsP Multilayer Specimen

Material/Specimen:

InP/GaInAsP Multilayer

Resource Type:

Article

Author:

OGIWARA, Toshiya, HARADA, Tomoko, and TANUMA, Shigeo

Journal:

Journal of The Surface Science Society of Japan

Date Uploaded:

01/10/2021

Date Modified:

01/10/2021

Depth Profiling Analysis of InP/GaInAsP Multilayer Structure with Auger Electron Spectroscopy by Using Argon Ion Spot Beam

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