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Filtering by: Journal ACS Nano Funder Ministry of Education, Culture, Sports, Science and Technology Type of work Publication Keyword contact resistance Publisher American Chemical Society (ACS) Resource type Article

Approach to Low Contact Resistance Formation on Buried Interface in Oxide Thin-Film Transistors: Utilization of Palladium-Mediated Hydrogen Pathway

Description/Abstract:

Amorphous oxide semiconductors (AOSs) with low off-currents and processing temperatures offer promising alternative materials for next-ge...

Keyword:

IGZO, contact resistance, hydrogen, oxide semiconductors, palladium, and thin-film transistors

Resource Type:

Article

Author:

Yuhao Shi, Masatake Tsuji, Hanjun Cho, Shigenori Ueda, Junghwan Kim, and Hideo Hosono

Journal:

ACS Nano

Date Uploaded:

08/04/2024

Approach to Low Contact Resistance Formation on Buried Interface in Oxide Thin-Film Transistors: Utilization of Palladium-Mediated Hydrogen Pathway

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