Index Catalog // MDR

Start Over

Filtering by: Creator TANUMA, Shigeo Keyword Auger Depth Profiling Analysis Rights Statement Sim In Copyright Material/Specimen InP/GaInAsP Multilayer

1. Depth Profiling Analysis of InP/GaInAsP Multilayer Structure with Auger Electron Spectroscopy by Using Argon Ion Spot Beam

Description/Abstract:: It is very difficult to obtained the Auger depth profile of InP multilayer structures with argon ion sputtering because the very large su...
Keyword:: Auger Depth Profiling Analysis, Argon Ion Spot Beam, and InP/GaInAsP Multilayer Specimen
Material/Specimen:: InP/GaInAsP Multilayer
Resource Type:: Article
Author:: OGIWARA, Toshiya, HARADA, Tomoko, and TANUMA, Shigeo
Journal:: Journal of The Surface Science Society of Japan
Date Uploaded:: 01/10/2021
Date Modified:: 01/10/2021

1. Depth Profiling Analysis of InP/GaInAsP Multilayer Structure with Auger Electron Spectroscopy by Using Argon Ion Spot Beam

Limit your search

Type of work

Keyword

Language

Publisher

Resource type

Visibility

Rights Statement Sim

Material/Specimen

Author

Journal

Search Constraints

Search Results

1. Depth Profiling Analysis of InP/GaInAsP Multilayer Structure with Auger Electron Spectroscopy by Using Argon Ion Spot Beam

Limit your search