Index Catalog // MDR

Description/Abstract:: We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:: Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam
Resource Type:: Dataset
Data origin:: experiments
Author:: OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki
Date Uploaded:: 09/02/2023
Date Modified:: 30/03/2024

Description/Abstract:: With the development of data-driven research, an efficient and practical data collection system is required. National Institute for Mater...
Keyword:: データアーキテクチャ, IoT, データ収集システム, メタデータ, and XML スキーマ
Resource Type:: Article
Author:: MATSUNAMI, Shigeyuki, MATSUDA, Asahiko, CHIKYOW, Toyohiro, HARADA, Yoshitomo, and YOSHIKAWA, Hideki
Journal:: 情報処理学会論文誌デジタルプラクティス
Date Uploaded:: 26/08/2021
Date Modified:: 26/08/2021

Description/Abstract:: In response to a progress of data-driven science in the materials science field, NIMS (National Institute for Materials Science) started ...
Keyword:: 研究データ, データフロー, 相互利用 FAIR, 材料データプラットフォーム DICE, データリポジトリ, メタデータスキーマ, and マテリアル・インフォマティクス
Resource Type:: Article
Author:: TANIFUJI, Mikiko and YOSHIKAWA, Hideki
Journal:: 情報処理学会論文誌デジタルプラクティス
Date Uploaded:: 25/08/2021
Date Modified:: 25/08/2021

Description/Abstract:: We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:: Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam
Resource Type:: Dataset
Data origin:: experiments
Author:: OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki
Date Uploaded:: 07/08/2023

Description/Abstract:: We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:: Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam
Resource Type:: Dataset
Data origin:: experiments
Author:: OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki
Date Uploaded:: 13/07/2023
Date Modified:: 07/08/2023

Description/Abstract:: We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:: Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam
Resource Type:: Dataset
Data origin:: experiments
Author:: OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki
Date Uploaded:: 23/06/2023
Date Modified:: 18/07/2023

Description/Abstract:: We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:: Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam
Resource Type:: Dataset
Data origin:: experiments
Author:: OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki
Date Uploaded:: 29/05/2023
Date Modified:: 26/06/2023

Description/Abstract:: We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:: Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam
Resource Type:: Dataset
Data origin:: experiments
Author:: OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki
Date Uploaded:: 22/11/2022
Date Modified:: 30/05/2023

Description/Abstract:: We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:: Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam
Resource Type:: Dataset
Data origin:: experiment
Author:: OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki
Date Uploaded:: 20/04/2023

Description/Abstract:: We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:: Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam
Resource Type:: Dataset
Data origin:: experiments
Author:: OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki
Date Uploaded:: 21/12/2022
Date Modified:: 09/02/2023

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