Filtering by: Author Tanuma, Shigeo Remove constraint Author: Tanuma, Shigeo Keyword argon ion sputtering Remove constraint Keyword: argon ion sputtering Keyword surface observation using a scanning electron microscope Remove constraint Keyword: surface observation using a scanning electron microscope Material/Specimen GaAs Remove constraint Material/Specimen: GaAs Material/Specimen InP Remove constraint Material/Specimen: InP