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Filtering by: Author Ogiwara, Toshiya Type of work Publication Keyword Si/Ge multiple delta-doped layers Publisher The Surface Science Society of Japan Rights Statement Sim In Copyright

Ultra High Depth Resolution Auger Depth Profiling by Both Electron and Ion Beams at the Glancing Incidence using an Inclined Specimen Holder

Description/Abstract:

We developed a 85°-high-angle inclined specimen holder which enabled the specimen surface to be irradiated by both electron and ion beams...

Keyword:

Auger Depth Profiling Analysis, Inclined Holder, GaAs/AlAs Superlattice, and Si/Ge multiple delta-doped layers

Material/Specimen:

GaAs/AlAs Superlattice and Si/Ge multiple delta-doped layers

Resource Type:

Article

Author:

Ogiwara, Toshiya, Nagatomi, Takaharu, Kim, Kyung Joong, and Tanuma, Shigeo

Journal:

Journal of The Surface Science Society of Japan

Date Uploaded:

08/09/2021

Date Modified:

08/09/2021

Ultra High Depth Resolution Auger Depth Profiling by Both Electron and Ion Beams at the Glancing Incidence using an Inclined Specimen Holder

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