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OGIWARA, Toshiya
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Raw data files for Fig. 12 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
Description/Abstract:
We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:
Auger depth profiling analysis
,
HfO2/Si
, and
Ultra low angle incidence ion beam
Resource Type:
Dataset
Data origin:
experiments
Author:
OGIWARA, Toshiya
,
NAGATA, Takahiro
, and
YOSHIKAWA, Hideki
Date Uploaded:
07/08/2023
Raw data files for Fig. 11 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
Description/Abstract:
We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:
Auger depth profiling analysis
,
HfO2/Si
, and
Ultra low angle incidence ion beam
Resource Type:
Dataset
Data origin:
experiments
Author:
OGIWARA, Toshiya
,
NAGATA, Takahiro
, and
YOSHIKAWA, Hideki
Date Uploaded:
13/07/2023
Date Modified:
07/08/2023
Raw data files for Fig. 10 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
Description/Abstract:
We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:
Auger depth profiling analysis
,
HfO2/Si
, and
Ultra low angle incidence ion beam
Resource Type:
Dataset
Data origin:
experiments
Author:
OGIWARA, Toshiya
,
NAGATA, Takahiro
, and
YOSHIKAWA, Hideki
Date Uploaded:
23/06/2023
Date Modified:
18/07/2023
Raw data files for Fig. 9 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
Description/Abstract:
We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:
Auger depth profiling analysis
,
HfO2/Si
, and
Ultra low angle incidence ion beam
Resource Type:
Dataset
Data origin:
experiments
Author:
OGIWARA, Toshiya
,
NAGATA, Takahiro
, and
YOSHIKAWA, Hideki
Date Uploaded:
29/05/2023
Date Modified:
26/06/2023
Raw data files for Fig. 5 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
Description/Abstract:
We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:
Auger depth profiling analysis
,
HfO2/Si
, and
Ultra low angle incidence ion beam
Resource Type:
Dataset
Data origin:
experiment
Author:
OGIWARA, Toshiya
,
NAGATA, Takahiro
, and
YOSHIKAWA, Hideki
Date Uploaded:
20/04/2023
Raw data files for Fig. 6 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
Description/Abstract:
We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:
Auger depth profiling analysis
,
HfO2/Si
, and
Ultra low angle incidence ion beam
Resource Type:
Dataset
Data origin:
experiments
Author:
OGIWARA, Toshiya
,
NAGATA, Takahiro
, and
YOSHIKAWA, Hideki
Date Uploaded:
09/02/2023
Date Modified:
30/03/2024
Raw data files for Fig. 7 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
Description/Abstract:
We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:
Auger depth profiling analysis
,
HfO2/Si
, and
Ultra low angle incidence ion beam
Resource Type:
Dataset
Data origin:
experiments
Author:
OGIWARA, Toshiya
,
NAGATA, Takahiro
, and
YOSHIKAWA, Hideki
Date Uploaded:
21/12/2022
Date Modified:
09/02/2023
Raw data files for Fig. 8 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"
Description/Abstract:
We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:
Auger depth profiling analysis
,
HfO2/Si
, and
Ultra low angle incidence ion beam
Resource Type:
Dataset
Data origin:
experiments
Author:
OGIWARA, Toshiya
,
NAGATA, Takahiro
, and
YOSHIKAWA, Hideki
Date Uploaded:
22/11/2022
Date Modified:
30/05/2023
Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy, Quantitative Evaluation of the Surface Roughness Caused by Ion Sputtering
Description/Abstract:
We have conducted Auger depth profiling analyses of InP/GaInAsP multilayer specimens, in which the surface roughness was caused by the ar...
Keyword:
Auger depth profiling analysis
,
InP/GaInAsP multilayer specimens
,
surface roughness
,
atomic force microscope
, and
depth resolution function
Material/Specimen:
InP/GaInAsP multilayer specimens
Resource Type:
Article
Author:
OGIWARA, Toshiya
and
TANUMA, Shigeo
Journal:
Journal of The Surface Science Society of Japan
Date Uploaded:
01/10/2021
Date Modified:
01/10/2021
Auger Depth Profiling Analyses of InP/GaInAsP Multilayers
Description/Abstract:
We have investigated the dependence of the depth resolution of Auger depth profiles of InP/GaInAsP multilayer specimens on the sputtering...
Keyword:
Auger depth profiling analysis
,
InP/GaInAsP multilayer specimens
, and
argon ion sputtering
Material/Specimen:
InP/GaInAsP multilayer specimens
Resource Type:
Article
Author:
OGIWARA, Toshiya
and
TANUMA, Shigeo
Journal:
Journal of The Surface Science Society of Japan
Date Uploaded:
01/10/2021
Date Modified:
01/10/2021
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Auger depth profiling analysis
11
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Ultra low angle incidence ion beam
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4
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National Institute for Materials Science
7
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spectroscopy
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InP/GaInAsP multilayer specimens
2
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InP/GaInAsP Multilayer
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Author
OGIWARA, Toshiya
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12
NAGATA, Takahiro
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Journal of The Surface Science Society of Japan
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