Index Catalog // MDR

Description/Abstract:: We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:: Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam
Resource Type:: Dataset
Data origin:: experiments
Author:: OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki
Date Uploaded:: 21/12/2022
Date Modified:: 23/12/2022

Description/Abstract:: We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:: Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam
Resource Type:: Dataset
Data origin:: experiments
Author:: OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki
Date Uploaded:: 22/11/2022
Date Modified:: 23/12/2022

Description/Abstract:: We have conducted Auger depth profiling analyses of InP/GaInAsP multilayer specimens, in which the surface roughness was caused by the ar...
Keyword:: Auger depth profiling analysis, InP/GaInAsP multilayer specimens, surface roughness, atomic force microscope, and depth resolution function
Material/Specimen:: InP/GaInAsP multilayer specimens
Resource Type:: Article
Author:: OGIWARA, Toshiya and TANUMA, Shigeo
Journal:: Journal of The Surface Science Society of Japan
Date Uploaded:: 01/10/2021
Date Modified:: 01/10/2021

Description/Abstract:: We have investigated the dependence of the depth resolution of Auger depth profiles of InP/GaInAsP multilayer specimens on the sputtering...
Keyword:: Auger depth profiling analysis, InP/GaInAsP multilayer specimens, and argon ion sputtering
Material/Specimen:: InP/GaInAsP multilayer specimens
Resource Type:: Article
Author:: OGIWARA, Toshiya and TANUMA, Shigeo
Journal:: Journal of The Surface Science Society of Japan
Date Uploaded:: 01/10/2021
Date Modified:: 01/10/2021

Description/Abstract:: We have carried out the Auger depth profiling analysis of GaAs/AIAs multilayer structure using the peaks of GaMVV and A1LVV. Since the tw...
Keyword:: Auger depth profiling analysis, GaAs/AlAs multilayer, non-negative least-square curve fit, and peak separation
Material/Specimen:: GaAs/AlAs multilayer
Resource Type:: Article
Author:: OGIWARA, Toshiya and TANUMA, Shigeo
Journal:: Journal of The Surface Science Society of Japan
Date Uploaded:: 01/10/2021
Date Modified:: 01/10/2021

Description/Abstract:: It is very difficult to obtained the Auger depth profile of InP multilayer structures with argon ion sputtering because the very large su...
Keyword:: Auger Depth Profiling Analysis, Argon Ion Spot Beam, and InP/GaInAsP Multilayer Specimen
Material/Specimen:: InP/GaInAsP Multilayer
Resource Type:: Article
Author:: OGIWARA, Toshiya, HARADA, Tomoko, and TANUMA, Shigeo
Journal:: Journal of The Surface Science Society of Japan
Date Uploaded:: 01/10/2021
Date Modified:: 01/10/2021

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