Index Catalog // MDR

Start Over

Filtering by: Author OGIWARA, Toshiya Keyword InP/GaInAsP Multilayer Specimen Language Japanese Material/Specimen InP/GaInAsP Multilayer Visibility open

Depth Profiling Analysis of InP/GaInAsP Multilayer Structure with Auger Electron Spectroscopy by Using Argon Ion Spot Beam

Description/Abstract:

It is very difficult to obtained the Auger depth profile of InP multilayer structures with argon ion sputtering because the very large su...

Keyword:

Auger Depth Profiling Analysis, Argon Ion Spot Beam, and InP/GaInAsP Multilayer Specimen

Material/Specimen:

InP/GaInAsP Multilayer

Resource Type:

Article

Author:

OGIWARA, Toshiya, HARADA, Tomoko, and TANUMA, Shigeo

Journal:

Journal of The Surface Science Society of Japan

Date Uploaded:

01/10/2021

Date Modified:

01/10/2021

Depth Profiling Analysis of InP/GaInAsP Multilayer Structure with Auger Electron Spectroscopy by Using Argon Ion Spot Beam

Limit your search

Type of work

Keyword

Language

Publisher

Resource type

Visibility

Rights Statement Sim

Material/Specimen

Author

Journal

Search Constraints

Search Results

Limit your search