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Filtering by: Author OGIWARA, Toshiya Author TANUMA, Shigeo Keyword GaAs/AlAs multilayer Keyword non-negative least-square curve fit Language Japanese

1. Auger Depth Profile Analysis of GaAs/AIAs Thin Film by Synthesized Spectrum Method Using Non-Negative Least Square Curve Fitting

Description/Abstract:: We have carried out the Auger depth profiling analysis of GaAs/AIAs multilayer structure using the peaks of GaMVV and A1LVV. Since the tw...
Keyword:: Auger depth profiling analysis, GaAs/AlAs multilayer, non-negative least-square curve fit, and peak separation
Material/Specimen:: GaAs/AlAs multilayer
Resource Type:: Article
Author:: OGIWARA, Toshiya and TANUMA, Shigeo
Journal:: Journal of The Surface Science Society of Japan
Date Uploaded:: 01/10/2021
Date Modified:: 01/10/2021

1. Auger Depth Profile Analysis of GaAs/AIAs Thin Film by Synthesized Spectrum Method Using Non-Negative Least Square Curve Fitting

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1. Auger Depth Profile Analysis of GaAs/AIAs Thin Film by Synthesized Spectrum Method Using Non-Negative Least Square Curve Fitting

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