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Nagatomi, Takaharu
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Tanuma, Shigeo
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Journal of The Surface Science Society of Japan
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Ultra High Depth Resolution Auger Depth Profiling by Both Electron and Ion Beams at the Glancing Incidence using an Inclined Specimen Holder
Description/Abstract:
We developed a 85°-high-angle inclined specimen holder which enabled the specimen surface to be irradiated by both electron and ion beams...
Keyword:
Auger Depth Profiling Analysis
,
Inclined Holder
,
GaAs/AlAs Superlattice
, and
Si/Ge multiple delta-doped layers
Material/Specimen:
GaAs/AlAs Superlattice and Si/Ge multiple delta-doped layers
Resource Type:
Article
Author:
Ogiwara, Toshiya
,
Nagatomi, Takaharu
,
Kim, Kyung Joong
, and
Tanuma, Shigeo
Journal:
Journal of The Surface Science Society of Japan
Date Uploaded:
08/09/2021
Date Modified:
08/09/2021
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Keyword
Auger Depth Profiling Analysis
1
GaAs/AlAs Superlattice
1
Inclined Holder
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Si/Ge multiple delta-doped layers
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Language
Japanese
1
Publisher
The Surface Science Society of Japan
1
Resource type
Article
1
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open
1
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In Copyright
1
Material/Specimen
GaAs/AlAs Superlattice and Si/Ge multiple delta-doped layers
1
Author
Kim, Kyung Joong
1
Nagatomi, Takaharu
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1
Ogiwara, Toshiya
1
Tanuma, Shigeo
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1
Journal
Journal of The Surface Science Society of Japan
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1