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Kim, Kyung Joong
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Ultra High Depth Resolution Auger Depth Profiling by Both Electron and Ion Beams at th...
High-Sensitivity and High-Depth Resolution Auger Depth Profiling Using an Inclined Hol...
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Publication
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Auger Depth Profiling Analysis
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GaAs/AlAs Superlattice
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Inclined Holder
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Si/Ge multiple delta-doped layers
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Japanese
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Surface Analysis Society of Japan
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The Surface Science Society of Japan
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GaAs/AlAs Superlattice
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GaAs/AlAs Superlattice and Si/Ge multiple delta-doped layers
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Si/Ge multiple delta-doped layers
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Author
Kim, Kyung Joong
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Nagatomi, Takaharu
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Ogiwara, Toshiya
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Tanuma, Shigeo
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Journal
Journal of Surface Analysis
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Journal of The Surface Science Society of Japan
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