Skip to Content
Toggle navigation
Home
About
Help
Contact
Login
Search MDR
Go
Search Constraints
Start Over
Filtering by:
Author
Kim, Kyung Joong
Remove constraint Author: Kim, Kyung Joong
Author
Tanuma, Shigeo
Remove constraint Author: Tanuma, Shigeo
Type of work
Publication
Remove constraint Type of work: Publication
1
-
2
of
2
Sort by relevance
relevance
date uploaded ▼
date uploaded ▲
date modified ▼
date modified ▲
Number of results to display per page
10 per page
10
per page
20
per page
50
per page
100
per page
View results as:
List
Gallery
Masonry
Slideshow
Search Results
Ultra High Depth Resolution Auger Depth Profiling by Both Electron and Ion Beams at the Glancing Incidence using an Inclined Specimen Holder
Description/Abstract:
We developed a 85°-high-angle inclined specimen holder which enabled the specimen surface to be irradiated by both electron and ion beams...
Keyword:
Auger Depth Profiling Analysis
,
Inclined Holder
,
GaAs/AlAs Superlattice
, and
Si/Ge multiple delta-doped layers
Material/Specimen:
GaAs/AlAs Superlattice and Si/Ge multiple delta-doped layers
Resource Type:
Article
Author:
Ogiwara, Toshiya
,
Nagatomi, Takaharu
,
Kim, Kyung Joong
, and
Tanuma, Shigeo
Journal:
Journal of The Surface Science Society of Japan
Date Uploaded:
08/09/2021
Date Modified:
08/09/2021
High-Sensitivity and High-Depth Resolution Auger Depth Profiling Using an Inclined Holder based on Geometric Characteristics of Auger Electron Spectroscopy Apparatus Equipped with Concentric Hemispherical Analyzer
Description/Abstract:
半球型電子分光器を搭載したオージェ電子分光装置では，傾斜ホルダーを用いると装置のジオ メトリー特性との関係からイオン及び一次電子の入射角の自由度が大きくなる.特に試料回転の 回転軸が一次電子の入射方向と一致する場合は，傾斜ホルダーの回転角によってイオン入射角を 設定でき，電...
Keyword:
Auger Depth Profiling Analysis
,
Inclined Holder
,
GaAs/AlAs Superlattice
, and
Si/Ge multiple delta-doped layers
Material/Specimen:
GaAs/AlAs Superlattice
and
Si/Ge multiple delta-doped layers
Resource Type:
Article
Author:
Ogiwara, Toshiya
,
Nagatomi, Takaharu
,
Kim, Kyung Joong
, and
Tanuma, Shigeo
Journal:
Journal of Surface Analysis
Date Uploaded:
14/06/2021
Date Modified:
18/06/2021
Toggle facets
Limit your search
Type of work
Publication
[remove]
2
Keyword
Auger Depth Profiling Analysis
2
GaAs/AlAs Superlattice
2
Inclined Holder
2
Si/Ge multiple delta-doped layers
2
Language
Japanese
2
Publisher
Surface Analysis Society of Japan
1
The Surface Science Society of Japan
1
Resource type
Article
2
Visibility
open
2
Rights Statement Sim
In Copyright
2
Material/Specimen
GaAs/AlAs Superlattice
1
GaAs/AlAs Superlattice and Si/Ge multiple delta-doped layers
1
Si/Ge multiple delta-doped layers
1
Author
Kim, Kyung Joong
[remove]
2
Nagatomi, Takaharu
2
Ogiwara, Toshiya
2
Tanuma, Shigeo
[remove]
2
Journal
Journal of Surface Analysis
1
Journal of The Surface Science Society of Japan
1