Index Catalog // MDR

Start Over

Filtering by: Author Kim, Kyung Joong Author Tanuma, Shigeo Journal Journal of The Surface Science Society of Japan Keyword Auger Depth Profiling Analysis Keyword GaAs/AlAs Superlattice

Ultra High Depth Resolution Auger Depth Profiling by Both Electron and Ion Beams at the Glancing Incidence using an Inclined Specimen Holder

Description/Abstract:

We developed a 85°-high-angle inclined specimen holder which enabled the specimen surface to be irradiated by both electron and ion beams...

Keyword:

Auger Depth Profiling Analysis, Inclined Holder, GaAs/AlAs Superlattice, and Si/Ge multiple delta-doped layers

Material/Specimen:

GaAs/AlAs Superlattice and Si/Ge multiple delta-doped layers

Resource Type:

Article

Author:

Ogiwara, Toshiya, Nagatomi, Takaharu, Kim, Kyung Joong, and Tanuma, Shigeo

Journal:

Journal of The Surface Science Society of Japan

Date Uploaded:

08/09/2021

Date Modified:

08/09/2021

Ultra High Depth Resolution Auger Depth Profiling by Both Electron and Ion Beams at the Glancing Incidence using an Inclined Specimen Holder

Limit your search

Type of work

Keyword

Language

Publisher

Resource type

Visibility

Rights Statement Sim

Material/Specimen

Author

Journal

Search Constraints

Search Results

Limit your search