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Filtering by: Keyword GaAs/AlAs multilayer Remove constraint Keyword: GaAs/AlAs multilayer Rights Statement Sim In Copyright Remove constraint Rights Statement Sim: In Copyright

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Auger Depth Profile Analysis of GaAs/AIAs Thin Film by Synthesized Spectrum Method Usi...

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Type of work

Publication1

Keyword

Auger depth profiling analysis1
GaAs/AlAs multilayer[remove]1
non-negative least-square curve fit1
peak separation1

Language

Japanese1

Publisher

Surface Science Society of Japan1

Resource type

Article1

Visibility

open1

Rights Statement Sim

In Copyright[remove]1

Material/Specimen

GaAs/AlAs multilayer1

Author

OGIWARA, Toshiya1
TANUMA, Shigeo1

Journal

Journal of The Surface Science Society of Japan1

National Institute for Materials Science

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