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Arイオンスパッタリングされた各種化合物半導体表面のSEM観察
Description/Abstract:
各種化合物半導体の表面をArイオンでスパッタリングして,その表面のSEM観察を行なった.そして,イオンスパッタリング時の試料温度および試料回転の有無と表面形状の関係を系統的に調べた.その結果,表面あれはスパッタリングされた表面全体に生成する場合とコーン状の突起物がランダムに...
Keyword:
compound semiconductor
,
surface observation using a scanning electron microscope
, and
argon ion sputtering
Material/Specimen:
InP
,
InSb
,
InAs
,
GaAs
,
GaSb
, and
GaP
Resource Type:
Article
Author:
Ogiwara, Toshiya
and
Tanuma, Shigeo
Journal:
Journal of Surface Analysis
Date Uploaded:
28/05/2021
Date Modified:
04/06/2021
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argon ion sputtering
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compound semiconductor
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surface observation using a scanning electron microscope
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Japanese
1
Publisher
Surface Analysis Society of Japan
1
Resource type
Article
1
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open
1
Rights Statement Sim
In Copyright
1
Material/Specimen
GaAs
1
GaP
1
GaSb
1
InAs
1
InP
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Author
Ogiwara, Toshiya
1
Tanuma, Shigeo
1
Journal
Journal of Surface Analysis
1