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Filtering by: Author Katsuaki Kawara Remove constraint Author: Katsuaki Kawara Author Yuichi Oshima Remove constraint Author: Yuichi Oshima Rights Statement Sim In Copyright Remove constraint Rights Statement Sim: In Copyright

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Rapid growth of α-Ga2O3 by HCl-boosted halide vapor phase epitaxy and effect of precursor supply conditions on crystal properties

Description/Abstract:

We investigated the effect of supply conditions of GaCl, O2, and additional HCl on the growth rate of (0001) alpha-Ga2O3 by halide vapor ...

Keyword:

HVPE and α-Ga2O3

Resource Type:

Article

Author:

Yuichi Oshima, Katsuaki Kawara, Takayoshi Oshima, Mitsuru Okigawa, and Takashi Shinohe

Journal:

SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Date Uploaded:

22/01/2024

Date Modified:

23/01/2024
In-plane orientation control of (001) κ-Ga2O3 by epitaxial lateral overgrowth through a geometrical natural selection mechanism

Description/Abstract:

The present work demonstrates a new technique to solve the in-plane rotational domain problem. In the technique, κ-Ga2O3 was grown by epi...

Keyword:

ELO, HVPE, domain, ε-Ga2O3, and κ-Ga2O3

Resource Type:

Article

Author:

Yuichi Oshima, Katsuaki Kawara, Takayoshi Oshima, and Takashi Shinohe

Journal:

JAPANESE JOURNAL OF APPLIED PHYSICS

Date Uploaded:

22/01/2024

Date Modified:

23/01/2024
Phase-controlled epitaxial lateral overgrowth of α-Ga2O3 by halide vapor phase epitaxy

Description/Abstract:

We investigated the effect of mask materials on the epitaxial lateral overgrowth (ELO) characteristics of alpha-Ga2O3 and developed an EL...

Keyword:

ELO, HVPE, and α-Ga2O3

Resource Type:

Article

Author:

Yuichi Oshima, Katsuaki Kawara, Takayoshi Oshima, Mitsuru Okigawa, and Takashi Shinohe

Journal:

JAPANESE JOURNAL OF APPLIED PHYSICS

Date Uploaded:

22/01/2024

Date Modified:

23/01/2024
Elimination of threading dislocations in α-Ga2O3 by double layered epitaxial lateral overgrowth

Description/Abstract:

We demonstrated the double layered epitaxial lateral overgrowth (ELO) of α-Ga2O3 by halide vapor phase epitaxy. Patterned masks were prep...

Keyword:

ELO, dislocation, and α-Ga2O3

Resource Type:

Article

Author:

Katsuaki Kawara, Yuichi Oshima, Mitsuru Okigawa, and Takashi Shinohe

Journal:

Applied Physics Express

Date Uploaded:

22/01/2024

Date Modified:

23/01/2024

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Publication4

Keyword

ELO3
HVPE3
α-Ga2O33
dislocation1
domain1
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Language

English4

Publisher

IOP Publishing4

Resource type

Article4

Visibility

open4

Rights Statement Sim

In Copyright[remove]4

Author

Katsuaki Kawara[remove]4
Takashi Shinohe4
Yuichi Oshima[remove]4
Mitsuru Okigawa3
Takayoshi Oshima3

Journal

JAPANESE JOURNAL OF APPLIED PHYSICS2
Applied Physics Express1
SEMICONDUCTOR SCIENCE AND TECHNOLOGY1

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