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Composition determination of beta-(AlxGa1-x)2O3 layers coherently grown on (010) beta-Ga2O3 substrates by high-resolution x-ray diffraction

Description/Abstract:

We demonstrate x-ray diffraction based composition estimation of b-(AlxGa1-x)2O3 coherently grown on (010) b-Ga2O3. The relation between ...

Keyword:

atom probe, composition, and β-Ga2O3

Resource Type:

Article

Author:

Yuichi Oshima, Elaheh Ahmadi, Stefan C. Badescu, Feng Wu, and James S. Speck

Journal:

APPLIED PHYSICS EXPRESS

Date Uploaded:

11/01/2024

Date Modified:

24/01/2024