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Filtering by: Keyword α-Ga2O3 Remove constraint Keyword: α-Ga2O3 Publisher IOP Publishing Remove constraint Publisher: IOP Publishing

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Halide Vapor Phase Epitaxy of twin-free a-Ga2O3 on sapphire (0001) substrates

Description/Abstract:

The halide vapor phase epitaxy of a-Ga2O3 is demonstrated for the first time. The films are twin-free, heteroepitaxially grown on sapphir...

Keyword:

HVPE and α-Ga2O3

Resource Type:

Article

Author:

Yuichi Oshima, Encarnación G. Víllora, and Kiyoshi Shimamura

Journal:

APPLIED PHYSICS EXPRESS

Date Uploaded:

22/01/2024

Date Modified:

22/01/2024
Rapid growth of α-Ga2O3 by HCl-boosted halide vapor phase epitaxy and effect of precursor supply conditions on crystal properties

Description/Abstract:

We investigated the effect of supply conditions of GaCl, O2, and additional HCl on the growth rate of (0001) alpha-Ga2O3 by halide vapor ...

Keyword:

HVPE and α-Ga2O3

Resource Type:

Article

Author:

Yuichi Oshima, Katsuaki Kawara, Takayoshi Oshima, Mitsuru Okigawa, and Takashi Shinohe

Journal:

SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Date Uploaded:

22/01/2024

Date Modified:

23/01/2024
Phase-controlled epitaxial lateral overgrowth of α-Ga2O3 by halide vapor phase epitaxy

Description/Abstract:

We investigated the effect of mask materials on the epitaxial lateral overgrowth (ELO) characteristics of alpha-Ga2O3 and developed an EL...

Keyword:

ELO, HVPE, and α-Ga2O3

Resource Type:

Article

Author:

Yuichi Oshima, Katsuaki Kawara, Takayoshi Oshima, Mitsuru Okigawa, and Takashi Shinohe

Journal:

JAPANESE JOURNAL OF APPLIED PHYSICS

Date Uploaded:

22/01/2024

Date Modified:

23/01/2024
Elimination of threading dislocations in α-Ga2O3 by double layered epitaxial lateral overgrowth

Description/Abstract:

We demonstrated the double layered epitaxial lateral overgrowth (ELO) of α-Ga2O3 by halide vapor phase epitaxy. Patterned masks were prep...

Keyword:

ELO, dislocation, and α-Ga2O3

Resource Type:

Article

Author:

Katsuaki Kawara, Yuichi Oshima, Mitsuru Okigawa, and Takashi Shinohe

Journal:

Applied Physics Express

Date Uploaded:

22/01/2024

Date Modified:

23/01/2024

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α-Ga2O3[remove]4
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Yuichi Oshima4
Katsuaki Kawara3
Mitsuru Okigawa3
Takashi Shinohe3
Takayoshi Oshima2
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APPLIED PHYSICS EXPRESS1
Applied Physics Express1
JAPANESE JOURNAL OF APPLIED PHYSICS1
SEMICONDUCTOR SCIENCE AND TECHNOLOGY1

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