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Ogiwara, Toshiya
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Journal of The Surface Science Society of Japan
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Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy. Effects of Zalar Rotation and Liquid Nitrogen Cold Stage
Description/Abstract:
We have investigated the Auger depth profiling analysis of InP/GaInAsP multilayer specimens. It is difficult to obtain the Auger depth pr...
Keyword:
Auger Depth Profiling Analysis
,
InP/GaInAsP Multilayers
,
Zalar Rotation Method
, and
Sample Cooling Method
Material/Specimen:
InP/GaInAsP Multilayers
Resource Type:
Article
Author:
Ogiwara, Toshiya
,
Tanuma, Shigeo
,
Nagasawa, Yuji
, and
Ikeo, Nobuyuki
Journal:
Journal of The Surface Science Society of Japan
Date Uploaded:
09/09/2021
Date Modified:
09/09/2021
Ultra High Depth Resolution Auger Depth Profiling by Both Electron and Ion Beams at the Glancing Incidence using an Inclined Specimen Holder
Description/Abstract:
We developed a 85°-high-angle inclined specimen holder which enabled the specimen surface to be irradiated by both electron and ion beams...
Keyword:
Auger Depth Profiling Analysis
,
Inclined Holder
,
GaAs/AlAs Superlattice
, and
Si/Ge multiple delta-doped layers
Material/Specimen:
GaAs/AlAs Superlattice and Si/Ge multiple delta-doped layers
Resource Type:
Article
Author:
Ogiwara, Toshiya
,
Nagatomi, Takaharu
,
Kim, Kyung Joong
, and
Tanuma, Shigeo
Journal:
Journal of The Surface Science Society of Japan
Date Uploaded:
08/09/2021
Date Modified:
08/09/2021
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2
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Auger Depth Profiling Analysis
2
GaAs/AlAs Superlattice
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InP/GaInAsP Multilayers
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Inclined Holder
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Sample Cooling Method
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Japanese
2
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Surface Science Society of Japan
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The Surface Science Society of Japan
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2
Material/Specimen
GaAs/AlAs Superlattice and Si/Ge multiple delta-doped layers
1
InP/GaInAsP Multilayers
1
Author
Ogiwara, Toshiya
[remove]
2
Tanuma, Shigeo
2
Ikeo, Nobuyuki
1
Kim, Kyung Joong
1
Nagasawa, Yuji
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Journal of The Surface Science Society of Japan
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