Skip to Content
Toggle navigation
Home
About
Help
Contact
Login
Search MDR
Go
Search Constraints
Start Over
Filtering by:
Keyword
Ga2O3
Remove constraint Keyword: Ga2O3
Publisher
IOP Publishing
Remove constraint Publisher: IOP Publishing
1
-
4
of
4
Sort by relevance
relevance
date uploaded ▼
date uploaded ▲
date modified ▼
date modified ▲
Number of results to display per page
10 per page
10
per page
20
per page
50
per page
100
per page
View results as:
List
Gallery
Masonry
Slideshow
Search Results
Self-aligned patterning on β-Ga2O3 substrates via backside-exposure photolithography
Description/Abstract:
β-Ga2O3 has not been patterned using backside-exposure lithography, despite its high potential applications in future power electronics a...
Keyword:
Ga2O3
and
lithography
Resource Type:
Article
Author:
Takayoshi Oshima
Journal:
JAPANESE JOURNAL OF APPLIED PHYSICS
Date Uploaded:
17/01/2024
Date Modified:
24/01/2024
Selective area growth of β-Ga2O3 by HCl-based halide vapor phase epitaxy
Description/Abstract:
We demonstrated selective area growth of β-Ga2O3 by HCl-based halide vapor phase epitaxy on SiO2-masked (001) and (010) β-Ga2O3 substrate...
Keyword:
Ga2O3
and
selective area growth
Resource Type:
Article
Author:
Takayoshi Oshima
and
Yuichi Oshima
Journal:
Applied Physics Express
Date Uploaded:
28/11/2023
Date Modified:
28/11/2023
α-Al2O3/Ga2O3 superlattices coherently grown on r-plane sapphire
Description/Abstract:
Ten-period binary α-Al2O3/Ga2O3 superlattices were fabricated on r-plane sapphire substrates by molecular beam epitaxy. By systematic var...
Keyword:
Ga2O3
and
Superlattice
Resource Type:
Article
Author:
Takayoshi Oshima
,
Yuji Kato
,
Masataka Imura
,
Yoshiko Nakayama
, and
Masaki Takeguchi
Journal:
APPLIED PHYSICS EXPRESS
Date Uploaded:
28/11/2023
Date Modified:
28/11/2023
Fabrication of coherent γ-Al2O3/Ga2O3 superlattices on MgAl2O4 substrates
Description/Abstract:
We succeeded in fabricating 10-period coherent γ Al2O3/Ga2O3 superlattices (SLs) on MgAl2O4 substrates by molecular beam epitaxy. By vary...
Keyword:
Ga2O3
and
Superlattice
Resource Type:
Article
Author:
Yuji Kato
,
Masataka Imura
,
Yoshiko Nakayama
,
Masaki Takeguchi
, and
Takayoshi Oshima
Journal:
APPLIED PHYSICS EXPRESS
Date Uploaded:
28/11/2023
Date Modified:
28/11/2023
Toggle facets
Limit your search
Type of work
Publication
4
Keyword
Ga2O3
[remove]
4
Superlattice
2
lithography
1
selective area growth
1
Language
English
4
Publisher
IOP Publishing
[remove]
4
Resource type
Article
4
Visibility
open
4
Rights Statement Sim
Creative Commons BY-NC-ND Attribution-NonCommercial-NoDerivs 4.0 International
3
In Copyright
1
Author
Takayoshi Oshima
4
Masaki Takeguchi
2
Masataka Imura
2
Yoshiko Nakayama
2
Yuji Kato
2
more
Authors
»
Funder
科研費
1
Journal
APPLIED PHYSICS EXPRESS
2
Applied Physics Express
1
JAPANESE JOURNAL OF APPLIED PHYSICS
1