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Filtering by: Characterization methods spectroscopy Author NAGATA, Takahiro Keyword Ultra low angle incidence ion beam Rights Statement Sim In Copyright

1. Raw data files for Fig. 12 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Description/Abstract:: We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:: Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam
Resource Type:: Dataset
Data origin:: experiments
Author:: OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki
Date Uploaded:: 07/08/2023

2. Raw data files for Fig. 11 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Description/Abstract:: We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:: Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam
Resource Type:: Dataset
Data origin:: experiments
Author:: OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki
Date Uploaded:: 13/07/2023
Date Modified:: 07/08/2023

3. Raw data files for Fig. 10 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Description/Abstract:: We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:: Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam
Resource Type:: Dataset
Data origin:: experiments
Author:: OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki
Date Uploaded:: 23/06/2023
Date Modified:: 18/07/2023

4. Raw data files for Fig. 9 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Description/Abstract:: We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:: Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam
Resource Type:: Dataset
Data origin:: experiments
Author:: OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki
Date Uploaded:: 29/05/2023
Date Modified:: 26/06/2023

5. Raw data files for Fig. 5 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Description/Abstract:: We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:: Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam
Resource Type:: Dataset
Data origin:: experiment
Author:: OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki
Date Uploaded:: 20/04/2023

6. Raw data files for Fig. 6 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Description/Abstract:: We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:: Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam
Resource Type:: Dataset
Data origin:: experiments
Author:: OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki
Date Uploaded:: 09/02/2023
Date Modified:: 30/03/2024

7. Raw data files for Fig. 7 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Description/Abstract:: We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:: Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam
Resource Type:: Dataset
Data origin:: experiments
Author:: OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki
Date Uploaded:: 21/12/2022
Date Modified:: 09/02/2023

8. Raw data files for Fig. 8 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Description/Abstract:: We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...
Keyword:: Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam
Resource Type:: Dataset
Data origin:: experiments
Author:: OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki
Date Uploaded:: 22/11/2022
Date Modified:: 30/05/2023