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Raw data files for Fig. 12 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Description/Abstract:

We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...

Keyword:

Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam

Resource Type:

Dataset

Data origin:

experiments

Author:

OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki

Date Uploaded:

07/08/2023
Raw data files for Fig. 11 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Description/Abstract:

We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...

Keyword:

Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam

Resource Type:

Dataset

Data origin:

experiments

Author:

OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki

Date Uploaded:

13/07/2023

Date Modified:

07/08/2023
Raw data files for Fig. 10 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Description/Abstract:

We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...

Keyword:

Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam

Resource Type:

Dataset

Data origin:

experiments

Author:

OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki

Date Uploaded:

23/06/2023

Date Modified:

18/07/2023
Raw data files for Fig. 9 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Description/Abstract:

We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...

Keyword:

Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam

Resource Type:

Dataset

Data origin:

experiments

Author:

OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki

Date Uploaded:

29/05/2023

Date Modified:

26/06/2023
Raw data files for Fig. 6 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Description/Abstract:

We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...

Keyword:

Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam

Resource Type:

Dataset

Data origin:

experiments

Author:

OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki

Date Uploaded:

09/02/2023

Date Modified:

30/03/2024
Raw data files for Fig. 7 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Description/Abstract:

We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...

Keyword:

Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam

Resource Type:

Dataset

Data origin:

experiments

Author:

OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki

Date Uploaded:

21/12/2022

Date Modified:

09/02/2023
Raw data files for Fig. 8 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"

Description/Abstract:

We have investigated the Auger depth profiling analysis of HfO2/Si by the glancing-angle ion beam sputtering method at an incident angle ...

Keyword:

Auger depth profiling analysis, HfO2/Si, and Ultra low angle incidence ion beam

Resource Type:

Dataset

Data origin:

experiments

Author:

OGIWARA, Toshiya, NAGATA, Takahiro, and YOSHIKAWA, Hideki

Date Uploaded:

22/11/2022

Date Modified:

30/05/2023

Limit your search

Type of work

Dataset7

Keyword

Auger depth profiling analysis7
HfO2/Si7
Ultra low angle incidence ion beam7

Publisher

National Institute for Materials Science6

Resource type

Dataset7

Visibility

open[remove]7

Rights Statement Sim

In Copyright7

Data origin

experiments[remove]7

Characterization methods

spectroscopy[remove]7

Author

NAGATA, Takahiro7
OGIWARA, Toshiya7
YOSHIKAWA, Hideki7

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