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Filtering by: Keyword Ga2O3 Publisher IOP Publishing

Self-aligned patterning on β-Ga2O3 substrates via backside-exposure photolithography

Description/Abstract:

β-Ga2O3 has not been patterned using backside-exposure lithography, despite its high potential applications in future power electronics a...

Keyword:

Ga2O3 and lithography

Resource Type:

Article

Author:

Takayoshi Oshima

Journal:

JAPANESE JOURNAL OF APPLIED PHYSICS

Date Uploaded:

17/01/2024

Date Modified:

24/01/2024
Selective area growth of β-Ga2O3 by HCl-based halide vapor phase epitaxy

Description/Abstract:

We demonstrated selective area growth of β-Ga2O3 by HCl-based halide vapor phase epitaxy on SiO2-masked (001) and (010) β-Ga2O3 substrate...

Keyword:

Ga2O3 and selective area growth

Resource Type:

Article

Author:

Takayoshi Oshima and Yuichi Oshima

Journal:

Applied Physics Express

Date Uploaded:

28/11/2023

Date Modified:

28/11/2023
α-Al2O3/Ga2O3 superlattices coherently grown on r-plane sapphire

Description/Abstract:

Ten-period binary α-Al2O3/Ga2O3 superlattices were fabricated on r-plane sapphire substrates by molecular beam epitaxy. By systematic var...

Keyword:

Ga2O3 and Superlattice

Resource Type:

Article

Author:

Takayoshi Oshima, Yuji Kato, Masataka Imura, Yoshiko Nakayama, and Masaki Takeguchi

Journal:

APPLIED PHYSICS EXPRESS

Date Uploaded:

28/11/2023

Date Modified:

28/11/2023
Fabrication of coherent γ-Al2O3/Ga2O3 superlattices on MgAl2O4 substrates

Description/Abstract:

We succeeded in fabricating 10-period coherent γ Al2O3/Ga2O3 superlattices (SLs) on MgAl2O4 substrates by molecular beam epitaxy. By vary...

Keyword:

Ga2O3 and Superlattice

Resource Type:

Article

Author:

Yuji Kato, Masataka Imura, Yoshiko Nakayama, Masaki Takeguchi, and Takayoshi Oshima

Journal:

APPLIED PHYSICS EXPRESS

Date Uploaded:

28/11/2023

Date Modified:

28/11/2023