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YOSHIKAWA, Hideki
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Raw data files for Fig. 12 Auger depth profiles in "Auger Depth Profiling Analysi...
Raw data files for Fig. 11 Auger depth profiles in "Auger Depth Profiling Analysi...
Raw data files for Fig. 10 Auger depth profiles in "Auger Depth Profiling Analysi...
Raw data files for Fig. 9 Auger depth profiles in "Auger Depth Profiling Analysis...
Raw data files for Fig. 5 Auger depth profiles in "Auger Depth Profiling Analysis...
Raw data files for Fig. 6 Auger depth profiles in "Auger Depth Profiling Analysis...
Raw data files for Fig. 7 Auger depth profiles in "Auger Depth Profiling Analysis...
Raw data files for Fig. 8 Auger depth profiles in "Auger Depth Profiling Analysis...
First-principles calculations of optical constants
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9
Keyword
Auger depth profiling analysis
8
HfO2/Si
8
Ultra low angle incidence ion beam
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compound semiconductor
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energy loss function
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Publisher
National Institute for Materials Science
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Rights Statement Sim
In Copyright
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Creative Commons BY Attribution 4.0 International
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Computational methods
density functional theory or electronic structure
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experiments
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experiment
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simulations
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Properties addressed
electrical -- dielectric constant and spectra
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optical
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Characterization methods
spectroscopy
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Date created
2021
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Author
YOSHIKAWA, Hideki
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NAGATA, Takahiro
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OGIWARA, Toshiya
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SHINOTSUKA, Hiroshi
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TANUMA, Shigeo
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Journal
e-Journal of Surface Science and Nanotechnology
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