Index Catalog // MDR

Start Over

Filtering by: Author Yuichi Oshima Journal Applied Physics Express

Elimination of threading dislocations in α-Ga2O3 by double layered epitaxial lateral overgrowth

Description/Abstract:

We demonstrated the double layered epitaxial lateral overgrowth (ELO) of α-Ga2O3 by halide vapor phase epitaxy. Patterned masks were prep...

Keyword:

ELO, dislocation, and α-Ga2O3

Resource Type:

Article

Author:

Katsuaki Kawara, Yuichi Oshima, Mitsuru Okigawa, and Takashi Shinohe

Journal:

Applied Physics Express

Date Uploaded:

22/01/2024

Date Modified:

23/01/2024
Selective area growth of β-Ga2O3 by HCl-based halide vapor phase epitaxy

Description/Abstract:

We demonstrated selective area growth of β-Ga2O3 by HCl-based halide vapor phase epitaxy on SiO2-masked (001) and (010) β-Ga2O3 substrate...

Keyword:

Ga2O3 and selective area growth

Resource Type:

Article

Author:

Takayoshi Oshima and Yuichi Oshima

Journal:

Applied Physics Express

Date Uploaded:

28/11/2023

Date Modified:

28/11/2023