Skip to Content
Toggle navigation
Home
About
Help
Contact
Login
Search MDR
Go
Search Constraints
Start Over
Filtering by:
Author
Masaharu Edo
Remove constraint Author: Masaharu Edo
Resource type
ProceedingsArticle
Remove constraint Resource type: ProceedingsArticle
1
entry found
Sort by relevance
relevance
date uploaded ▼
date uploaded ▲
date modified ▼
date modified ▲
Number of results to display per page
10 per page
10
per page
20
per page
50
per page
100
per page
View results as:
List
Gallery
Masonry
Slideshow
Search Results
Development of p-type Ion Implantation Technique for Realization of GaN Vertical MOSFETs
Description/Abstract:
GaN has attracted attention as a semiconductor material for next-generation power switching devices. Vertical-type GaN devices with MOS g...
Keyword:
atom probe tomography
,
gallium nitride
, and
transmission electron microscopy
Resource Type:
ProceedingsArticle
Author:
Ryo Tanaka
,
Shinya Takashima
,
Katsunori Ueno
,
Masahiro Horita
,
Jun Suda
,
Jun Uzuhashi
,
Tadakatsu Ohkubo
, and
Masaharu Edo
Date Uploaded:
19/04/2024
Toggle facets
Limit your search
Type of work
Publication
1
Keyword
atom probe tomography
1
gallium nitride
1
transmission electron microscopy
1
Language
English
1
Publisher
IEEE
1
Resource type
ProceedingsArticle
[remove]
1
Visibility
open
1
Rights Statement Sim
Creative Commons BY Attribution 4.0 International
1
Author
Jun Suda
1
Jun Uzuhashi
1
Katsunori Ueno
1
Masaharu Edo
[remove]
1
Masahiro Horita
1
more
Authors
»