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Plasma-free dry etching of (001) β-Ga2O3 substrates by HCl gas

Description/Abstract:

In this study, we dry etched SiO2-masked (001) b-Ga2O3 substrates in HCl gas flow at a high temperature without plasma excitation. The et...

Keyword:

Ga2O3, HCl, and etching

Resource Type:

Article

Author:

Takayoshi Oshima and Yuichi Oshima

Journal:

APPLIED PHYSICS LETTERS

Date Uploaded:

28/05/2024
631% room temperature tunnel magnetoresistance with large oscillation effect in CoFe/MgO/CoFe(001) junctions

Description/Abstract:

We demonstrate tunnel magnetoresistance (TMR) ratios of up to 631% at room temperature (RT) using CoFe/MgO/CoFe(001) epitaxial magnetic t...

Keyword:

MgO, TMR, epitaxial growth, magnetic tunnel junctions, spintronics, and tunnel magnetoresistance

Resource Type:

Article

Author:

Thomas Scheike, Zhenchao Wen, Hiroaki Sukegawa, and Seiji Mitani

Journal:

APPLIED PHYSICS LETTERS

Date Uploaded:

05/01/2024