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Filtering by: Author Tadakatsu Ohkubo Remove constraint Author: Tadakatsu Ohkubo Resource type ProceedingsArticle Remove constraint Resource type: ProceedingsArticle

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Development of p-type Ion Implantation Technique for Realization of GaN Vertical MOSFETs

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Type of work

Publication1

Keyword

atom probe tomography1
gallium nitride1
transmission electron microscopy1

Language

English1

Publisher

IEEE1

Resource type

ProceedingsArticle[remove]1

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open1

Rights Statement Sim

Creative Commons BY Attribution 4.0 International1

Author

Jun Suda1
Jun Uzuhashi1
Katsunori Ueno1
Masaharu Edo1
Masahiro Horita1
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