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説明:

A resonator with a high Q factor is generally pursued in the single-crystal diamond (SCD) microelectromechanical system (MEMS) for high-performance sensors. In this report, we investigate the oxygen etching effect of SCD on the Q factors of the SCD resonators by using the Raman spectroscopy spatial mapping. We aim to establish the etch pit effect on the Q factors of the SCD MEMS resonators. The 2D Raman imaging technique discloses the dislocations and the local stress in the SCD MEMS resonators in microscale. It is observed that the full width half maximum (FWHM) of the Raman spectra of the SCD resonators has marked relationship with the Q factors of the SCD resonators. The etch pits resulted from the dislocations have weak influence on the Q factors of the SCD resonators.

権利情報:

• Creative Commons BY Attribution 4.0 International
  

キーワード: Diamond, MEMS, Q factor

刊行年月日: 2023-12-31

出版者: Informa UK Limited

掲載誌:

• Functional diamond vol. 3 issue. 1 2221280

研究助成金:

原稿種別: 出版者版 (Version of record)

MDR DOI:

公開URL: https://doi.org/10.1080/26941112.2023.2221280

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更新時刻: 2024-03-05 16:30:18 +0900

MDRでの公開時刻: 2024-03-05 16:30:18 +0900