@misc{zilong2023a,
  title = {Effect of defects on Q factors of single-crystal diamond MEMS resonators},
  author = {Zilong Zhang, Guo Chen, Keyun Gu, Satoshi Koizumi, Meiyong Liao},
  publisher = {Informa UK Limited},
  year = {2023-12-31},
  keywords = {Diamond, MEMS,  Q factor}
}