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A resonator with a high Q factor is generally pursued in the single-crystal diamond (SCD) microelectromechanical system (MEMS) for high-performance sensors. In this report, we investigate the oxygen etching effect of SCD on the Q factors of the SCD resonators by using the Raman spectroscopy spatial mapping. We aim to establish the etch pit effect on the Q factors of the SCD MEMS resonators. The 2D Raman imaging technique discloses the dislocations and the local stress in the SCD MEMS resonators in microscale. It is observed that the full width half maximum (FWHM) of the Raman spectra of the SCD resonators has marked relationship with the Q factors of the SCD resonators. The etch pits resulted from the dislocations have weak influence on the Q factors of the SCD resonators.

Rights:

• Creative Commons BY Attribution 4.0 International
  

Keyword: Diamond, MEMS, Q factor

Date published: 2023-12-31

Publisher: Informa UK Limited

Journal:

• Functional diamond vol. 3 issue. 1 2221280

Funding:

Manuscript type: Publisher's version (Version of record)

MDR DOI:

First published URL: https://doi.org/10.1080/26941112.2023.2221280

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Updated at: 2024-03-05 16:30:18 +0900

Published on MDR: 2024-03-05 16:30:18 +0900