論文 Achieving High Piezoelectric Performance across a Wide Composition Range in Tetragonal (Bi,Na)TiO3–BaTiO3 Films for Micro-electromechanical Systems

Keisuke Ishihama ; Takao Shimizu SAMURAI ORCID (National Institute for Materials Science) ; Kazuki Okamoto ; Akinori Tateyama ; Wakiko Yamaoka ; Risako Tsurumaru ; Shintaro Yoshimura ; Yusuke Sato ; Hiroshi Funakubo

コレクション

引用
Keisuke Ishihama, Takao Shimizu, Kazuki Okamoto, Akinori Tateyama, Wakiko Yamaoka, Risako Tsurumaru, Shintaro Yoshimura, Yusuke Sato, Hiroshi Funakubo. Achieving High Piezoelectric Performance across a Wide Composition Range in Tetragonal (Bi,Na)TiO3–BaTiO3 Films for Micro-electromechanical Systems. ACS Applied Materials & Interfaces. 2024, 16 (1), 1308-1316. https://doi.org/10.1021/acsami.3c13302
SAMURAI

説明:

(abstract)

Tetragonal (1−x)(Bi,Na)TiO3−xBaTiO3 films exhibit enhanced piezoelectric properties
due to domain switching over a wide composition range. These properties were
observed over a significantly wider composition range than the morphotropic phase
boundary (MPB), which typically has a limited composition range of 1–2%. The
polarization axis was found to be along the in-plane direction for the tetragonal
composition range of x = 0.06–1.0, attributed to the tensile thermal strain from the
substrate during cooling after the film formation. A “two-step increase” in remanent
polarization against an applied maximum electric field was observed at high field region
due to the domain switching, and a very high piezoelectric response (effective d33 value,
denoted as d33,f) over 220 pm/V was achieved for a wide composition range of x = 0.2–
0.5 with high tetragonality, exceeding previously reported values for bulk ceramics.
Moreover, a transverse piezoelectric coefficient, e31,f, of 19 C/m2 measured using a
cantilever structure, was obtained for a composition range of at least 10 at% (for both x
= 0.2 and 0.3). This value is the highest reported for Pb-free piezoelectric thin films and
is comparable to the best data for Pb-based thin films. Reversible domain switching
eliminates the need for conventional MPB compositions, allowing an improvement in
piezoelectric properties over a wider composition range. This strategy could provide a
guideline for the development of environmentally acceptable lead-free piezoelectric
films with composition-insensitive piezoelectric performance to replace Pb-based
materials with the MPB composition, such as PZT.

権利情報:

キーワード: Pb-free Piezoelectric film, domain switching, out-of-morphotropic phase boundary composition, tetragonal structure

刊行年月日: 2024-01-10

出版者: American Chemical Society (ACS)

掲載誌:

  • ACS Applied Materials & Interfaces (ISSN: 19448252) vol. 16 issue. 1 p. 1308-1316

研究助成金:

  • Ministry of Education, Culture, Sports, Science and Technology 20H05185
  • Core Research for Evolutional Science and Technology JPMXP0112101001
  • Japan Society for the Promotion of Science 23KJ0903
  • Japan Society for the Promotion of Science 19K15288

原稿種別: 出版者版 (Version of record)

MDR DOI:

公開URL: https://doi.org/10.1021/acsami.3c13302

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更新時刻: 2024-12-24 13:58:44 +0900

MDRでの公開時刻: 2024-12-24 13:58:44 +0900

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