Journal article Achieving High Piezoelectric Performance across a Wide Composition Range in Tetragonal (Bi,Na)TiO3–BaTiO3 Films for Micro-electromechanical Systems
Keisuke Ishihama (author) (Search by this author)
;
Takao Shimizu (author) (Search by this author)
ORCID SAMURAI ;
Kazuki Okamoto (author) (Search by this author)
;
Akinori Tateyama (author) (Search by this author)
;
Wakiko Yamaoka (author) (Search by this author)
;
Risako Tsurumaru (author) (Search by this author)
;
Shintaro Yoshimura (author) (Search by this author)
;
Yusuke Sato (author) (Search by this author)
;
Hiroshi Funakubo (author) (Search by this author)
Collection

Citation
Keisuke Ishihama, Takao Shimizu, Kazuki Okamoto, Akinori Tateyama, Wakiko Yamaoka, Risako Tsurumaru, Shintaro Yoshimura, Yusuke Sato, Hiroshi Funakubo. Achieving High Piezoelectric Performance across a Wide Composition Range in Tetragonal (Bi,Na)TiO3–BaTiO3 Films for Micro-electromechanical Systems. ACS Applied Materials & Interfaces. 2024, 16 (1), 1308-1316. https://doi.org/10.1021/acsami.3c13302
SAMURAI

Description:

(abstract)

Tetragonal (1−x)(Bi,Na)TiO3−xBaTiO3 films exhibit enhanced piezoelectric properties
due to domain switching over a wide composition range. These properties were
observed over a significantly wider composition range than the morphotropic phase
boundary (MPB), which typically has a limited composition range of 1–2%. The
polarization axis was found to be along the in-plane direction for the tetragonal
composition range of x = 0.06–1.0, attributed to the tensile thermal strain from the
substrate during cooling after the film formation. A “two-step increase” in remanent
polarization against an applied maximum electric field was observed at high field region
due to the domain switching, and a very high piezoelectric response (effective d33 value,
denoted as d33,f) over 220 pm/V was achieved for a wide composition range of x = 0.2–
0.5 with high tetragonality, exceeding previously reported values for bulk ceramics.
Moreover, a transverse piezoelectric coefficient, e31,f, of 19 C/m2 measured using a
cantilever structure, was obtained for a composition range of at least 10 at% (for both x
= 0.2 and 0.3). This value is the highest reported for Pb-free piezoelectric thin films and
is comparable to the best data for Pb-based thin films. Reversible domain switching
eliminates the need for conventional MPB compositions, allowing an improvement in
piezoelectric properties over a wider composition range. This strategy could provide a
guideline for the development of environmentally acceptable lead-free piezoelectric
films with composition-insensitive piezoelectric performance to replace Pb-based
materials with the MPB composition, such as PZT.

Rights:

Keyword: Pb-free Piezoelectric film, domain switching, out-of-morphotropic phase boundary composition, tetragonal structure

Date published: 2024-01-10

Publisher: American Chemical Society (ACS)

Journal:

  • ACS Applied Materials & Interfaces (ISSN: 19448252) vol. 16 issue. 1 p. 1308-1316

Funding:

  • Ministry of Education, Culture, Sports, Science and Technology 20H05185
  • Core Research for Evolutional Science and Technology JPMXP0112101001
  • Japan Society for the Promotion of Science 23KJ0903
  • Japan Society for the Promotion of Science 19K15288

Manuscript type: Publisher's version (Version of record)

MDR DOI:

First published URL: https://doi.org/10.1021/acsami.3c13302

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Updated at: 2024-12-24 13:58:44 +0900

Published on MDR: 2024-12-24 13:58:44 +0900