Achieving High Piezoelectric Performance across a Wide Composition Range in Tetragonal (Bi,Na)TiO₃–BaTiO₃ Films for Micro-electromechanical Systems

論文

著者

Keisuke Ishihama ; Takao Shimizu ; Kazuki Okamoto ; Akinori Tateyama ; Wakiko Yamaoka ; Risako Tsurumaru ; Shintaro Yoshimura ; Yusuke Sato ; Hiroshi Funakubo

キーワード

Pb-free Piezoelectric film, domain switching, out-of-morphotropic phase boundary composition, tetragonal structure

刊行年月日

2024-01-10

更新時刻

2024-12-24 13:58:44 +0900