[Research Highlights Vol.68] New GaN MEMS Resonator Is Temperature-Stable up to 600 K

雑誌

コレクション

Research Highlights

著者

International Center for Materials Nanoarchitectonics (WPI-MANA)

キーワード

GaN, MEMS, NEMS, energy storage, temperature coefficient of frequency, AlN, Si, Strain

刊行年月日

2021-07-13

更新時刻

2023-12-26 21:38:08 +0900