Simulation-Based Investigation of Curtain Gas Effect on Metal-Organic Chemical Vapor Deposition Growth of Two-Dimensional Transition Metal Dichalcogenides

論文

著者

Feng Zhang ; Fanyu Zeng ; Daichi Kozawa ; Ryo Kitaura

キーワード

2D materials, Finite Element Method, Chemical Vapor Deposition

刊行年月日

2024-07-17

更新時刻

2025-07-08 08:30:18 +0900