Depth Profiling Analysis of InP/GaInAsP Multilayers by Auger Electron Spectroscopy, Quantitative Evaluation of the Surface Roughness Caused by Ion Sputtering

論文

著者

OGIWARA, Toshiya ; TANUMA, Shigeo

キーワード

depth resolution function, InP/GaInAsP multilayer specimens, Auger depth profiling analysis, surface roughness, atomic force microscope

刊行年月日

2011-06-10

更新時刻

2022-10-03 01:24:02 +0900