High-order resonance of single-crystal diamond MEMS with high-quality factor at high temperatures

プロシーディングス論文

著者

Guo Chen (author) (この著者で検索)

Guo Chen ;

Zilong Zhang (author) (この著者で検索)

Zilong Zhang ;

Keyun Gu (author) (この著者で検索)

Keyun Gu ;

Liwen Sang (author) (この著者で検索)

Liwen Sang ;

Satoshi Koizumi (author) (この著者で検索)

https://orcid.org/0000-0003-4961-5658

NIMS Researchers Directory SAMURAI

Satoshi Koizumi ;

Masaya Toda (author) (この著者で検索)

Masaya Toda ;

Yasuo Koide (author) (この著者で検索)

https://orcid.org/0000-0001-8321-9822

NIMS Researchers Directory SAMURAI

Yasuo Koide ;

Zhaohui Huang (author) (この著者で検索)

Zhaohui Huang ;

Meiyong Liao (author) (この著者で検索)

https://orcid.org/0000-0003-1361-4266

NIMS Researchers Directory SAMURAI

Meiyong Liao

キーワード

Diamond, MEMS

刊行年月日

2024-05-02

更新時刻

2024-10-11 16:30:28 +0900