Scalable alloy-based sputtering of high-conductivity PdCoO2 for advanced interconnects
- ジャーナル論文
- 著者
-
Takayuki Harada (author) (この著者で検索)
;
Zuin Ping Lily Ang (author) (この著者で検索)
https://orcid.org/0009-0008-1139-7273
(unauthenticated)
;
Yuki Sakakibara (author) (この著者で検索)
https://orcid.org/0009-0005-8271-2531
(unauthenticated)
;
Takuro Nagai (author) (この著者で検索)
;
Yasushi Masahiro (author) (この著者で検索)
https://orcid.org/0000-0003-4526-6817
(unauthenticated)
- キーワード
- Interconnect, Thin films, Conductive material, Low dimensional materials, Electronic materials
- 刊行年月日
- 2025-06-02
- 更新時刻
- 2025-06-10 08:30:11 +0900
H-Radical Reactive Infrared Laser Deposition of LiH: A Method for Growing High-Quality Metal Hydride Epitaxial Films
- ジャーナル論文
- 著者
-
;Kota Munefusa (author) (この著者で検索)Erika Fukushi (author) (この著者で検索)
https://orcid.org/0009-0003-7416-2360
(unauthenticated)
;
Takayuki Harada (author) (この著者で検索)
;
Hiroyuki Oguchi (author) (この著者で検索)
https://orcid.org/0000-0001-8062-4363
(unauthenticated)
- キーワード
- Hydride, Thin films
- 刊行年月日
- 2025-04-28
- 更新時刻
- 2025-07-14 16:30:24 +0900
Phase-selective sputter epitaxy of δ -NbN, γ -Nb4N3, and β -Nb2N on atomically flat AlN
- ジャーナル論文
- 著者
-
;Yuki Kato (author) (この著者で検索);Koryo Masuzawa (author) (この著者で検索)Takayuki Harada (author) (この著者で検索)National Institute for Materials Science
;
;Hideto Miyake (author) (この著者で検索)Atsushi Kobayashi (author) (この著者で検索)
- キーワード
- Thin films, Superconductivity, Nitrides
- 刊行年月日
- 2026-05-14
- 更新時刻
- 2026-06-16 11:26:56 +0900