Kota Munefusa
;
Erika Fukushi
;
Takayuki Harada
;
Hiroyuki Oguchi
説明:
(abstract)We present a new film growth method designed specifically for growing metal hydride thin films that we name “H-radical reactive infrared laser deposition”. This approach leverages hydrogen radicals (H·) to achieve rapid and complete metal hydrogenation, leading to high-purity hydride phases. We demonstrate the effectiveness of this method through the growth of LiH epitaxial thin films, where the H· supply eliminates Li precipitates and enhances crystallinity. Additionally, the use of an infrared laser minimizes film–substrate reactions, reducing the level of impurity formation. To explore the material tunability of this method, we successfully controlled film orientation and achieved Mg doping in LiH. Our findings establish H-radical reactive infrared laser deposition as a promising method for fabricating high-quality metal hydride thin films with tailored properties.
権利情報:
キーワード: Hydride, Thin films
刊行年月日: 2025-04-28
出版者: American Chemical Society (ACS)
掲載誌:
研究助成金:
原稿種別: 査読前原稿 (Author's original)
MDR DOI: https://doi.org/10.48505/nims.5587
公開URL: https://doi.org/10.1021/acs.inorgchem.4c05449
関連資料:
その他の識別子:
連絡先:
更新時刻: 2025-07-14 16:30:24 +0900
MDRでの公開時刻: 2025-07-14 16:17:18 +0900
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Manuscript_File_KM.pdf
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application/pdf |
サイズ | 1.3MB | 詳細 |