English Translation of J. Surf. Anal. 24, 192-205(2018), Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam
- ジャーナル論文
- 著者
-
Ogiwara, Toshiya (author) (この著者で検索)
;
Nagata, Takahiro (author) (この著者で検索)
;
Yoshikawa, Hideki (author) (この著者で検索)
- キーワード
- Auger Depth Profiling Analysis, HfO2/Si, Ultra Low Angle Incidence Ion Beam
- 刊行年月日
- 2020-06-04
- 更新時刻
- 2022-10-03 01:48:14 +0900
Depth Profiling Analysis of InP/GaInAsP Multilayer Structure with Auger Electron Spectroscopy by Using Argon Ion Spot Beam
- ジャーナル論文
- 著者
-
OGIWARA, Toshiya (author) (この著者で検索)
;
;HARADA, Tomoko (author) (この著者で検索)TANUMA, Shigeo (author) (この著者で検索)
- キーワード
- Auger Depth Profiling Analysis, InP/GaInAsP Multilayer Specimen, Argon Ion Spot Beam
- 刊行年月日
- 2011-06-10
- 更新時刻
- 2022-10-03 02:04:45 +0900