Epitaxial lateral overgrowth of r-plane α-Ga2O3 with stripe masks along -12-10>

ジャーナル論文

著者

Yuichi Oshima (author) (この著者で検索)

https://orcid.org/0000-0001-8293-4891

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Yuichi Oshima ;

Shingo Yagyu (author) (この著者で検索)

Shingo Yagyu ;

Takashi Shinohe (author) (この著者で検索)

Takashi Shinohe

キーワード

α-Ga2O3, HVPE, dislocation, ELO

刊行年月日

2021-11-07

更新時刻

2024-01-30 16:49:49 +0900